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    Nov 10, 2026  
2026-2027 Graduate Academic Calendar 
    
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2026-2027 Graduate Academic Calendar
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ENGR 5261G - Advanced Mechatronics: MEMS and Nanotechnology

This course is designed to be an introduction to micro-electromechanical systems (MEMS) and nanotechnology and their applications. Topics covered include introduction to MEMS and nanotechnology, working principles of MEMS and nanotechnology, design and fabrication of MEMS and nano-systems, microfabrication and micromachining, materials for MEMS and nanotechnology and applications of MEMS and nanotechnology.
Credit hours: 3


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