ENGR 5245G - Micro and Nano Manufacturing

This course will cover principles of fabrication and characterization technologies in micro and nano scale to learn major applications and principles of micro/nano systems in photonics, ICs and MEMS, and biomedical devices. The course will address specific techniques, such as photolithography, thin-film deposition, Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), advanced lithography, etc. The optical, electron and probe microscopy techniques for imaging at the micro and nano scale will be discussed. Also, the current status and future of micro and nano manufacturing in the field of microelectronics, photonics and biomedical engineering will be discussed in this course.
Credit hours: 3